In semiconductor devices, aluminum nitride ceramic and aluminum oxide ceramic parts play a key role in different scenarios due to their unique properties, and their performance advantages are as follows:

Performance advantages of aluminum nitride ceramic parts

1. Ultra high thermal conductivity: The thermal conductivity can reach 170-220W/(m · K), which is 7-10 times that of alumina ceramics. It can efficiently dissipate the heat generated during the operation of semiconductor equipment, especially suitable for high-power modules, high-frequency circuits and other components with strict heat dissipation requirements, avoiding the impact of high temperature on equipment stability and chip performance.

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2. Excellent electrical performance: high insulation resistance and stable electrical insulation even in high-frequency and high-temperature environments, meeting the requirements of high-frequency signal transmission and high-voltage insulation in semiconductor equipment.

3. Low thermal expansion coefficient: It has a high degree of matching with the thermal expansion coefficient of semiconductor materials such as silicon and gallium arsenide, which can reduce the stress caused by temperature changes, lower the risk of damage to components due to thermal expansion and contraction, and improve equipment reliability.

4. Good corrosion resistance: It can resist the erosion of corrosive gases such as fluorine, and can extend the service life of equipment in components that come into contact with corrosive media such as etching reaction chambers.

5. High temperature stability: Excellent high-temperature resistance, able to maintain structural and performance stability in high-temperature processes such as thin film deposition and annealing in semiconductor manufacturing.

Performance advantages of alumina ceramic parts

1. High mechanical strength and hardness: It has high bending strength and hardness, excellent wear resistance, and can withstand mechanical impact and friction during the operation of semiconductor equipment. It is suitable for making components such as cavities and nozzles that require long-term structural integrity.

2. Mature process and cost advantages: The preparation process is simple and mature, the production efficiency is high, and the cost is much lower than that of aluminum nitride ceramics. It is suitable for large-scale application in general components with moderate performance requirements.

3. Good electrical insulation: With stable insulation performance, it can meet the basic insulation requirements of most semiconductor devices, such as serving as electrode insulation support, circuit isolation components, etc.

4. Resistance to plasma erosion: It has good chemical stability in a plasma environment and can resist plasma bombardment and erosion. It is commonly used as a protective component for etching equipment to ensure process stability.

The performance advantages of both determine the application scenarios: alumina ceramics are suitable for general components that are cost sensitive and require a balance between basic mechanical and insulation properties; Aluminum nitride ceramics focus on the key core components required for high-end performance such as heat dissipation, high frequency, and high temperature. Jundro Ceramics, as a manufacturer specializing in precision five axis machining of special ceramics and special glass, is committed to providing high-quality material solutions for semiconductor component manufacturing.

发布于：广东省